Busch COBRA Semicon Dry Screw Vacuum Pumps

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  • COBRA – the next level of high capacity harsh duty vacuum pumps.
  • Ultimate pressure: 0.001 – 0.03 hPa (mbar)
  • Pumping speed 60 Hz: 85 – 7385 m³/h
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COBRA DS dry screw vacuum pumps offer state-of-the-art harsh duty process and high capacity load lock solutions for the most demanding solar, flat panel, semiconductor or coating applications. These vacuum pumps have best-in-class pumping speed combined with superior hydrogen throughput and excellent powder handling capabilities resulting from their unique screw pump design.

Equipped with high-efficiency motors and state-of-the-art idle mode capabilities, the COBRA DS series offers excellent energy savings potential.

Easy to service 
The compact design, with its separate booster and screw pump frames, allows for easy installation and maintenance.

Optimal cost of ownership
Due to their optimized space-saving design and energy savings potential, overall cost-of-ownership for these COBRA DS series vacuum pumps is low.

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